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Method for fabricating large-area gratings with a uniform duty cycle without a spatial beam modulator
Optics Express
|October 7, 2021
Summary
This study presents a novel fabrication method for large-area gratings with uniform duty, overcoming lens flaws and stray light issues. The technique successfully produced gratings larger than 30 mm with a 550 nm period using a Mach-Zehnder interferometer.
Area of Science:
- Optics and Photonics
- Materials Science
Background:
- Fabricating large-area gratings with uniform duty is challenging due to optical imperfections.
- Existing methods often rely on spatial beam modulators, limiting scalability.
Purpose of the Study:
- To develop a spatial beam modulator-free fabrication method for large-area, uniform gratings.
- To address and mitigate grating inhomogeneity caused by lens flaws and stray light.
Main Methods:
- Controlling exposure time and selecting appropriate beam expansion apertures to minimize optical aberrations.
- Developing a process model based on exposure and development time analysis.
- Utilizing a Mach-Zehnder interferometer optical path.
Main Results:
- Achieved a grating with a 550 nm period and a uniform duty cycle.
- Successfully fabricated gratings with a diameter exceeding 30 mm.
- Experimental results demonstrated good agreement with simulation models.
Conclusions:
- The developed method enables the fabrication of large-area gratings with high uniformity without a spatial beam modulator.
- The approach effectively compensates for optical system imperfections.
- Atomic force microscopy confirmed the high quality and uniformity of the fabricated gratings.
