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    This study presents a novel 2D silver cylindrical array grating for beam splitting, achieving high polarization-independent diffraction efficiency (DE) over the communication band. This advanced grating offers significant performance improvements for optical applications.

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    Area of Science:

    • Optics and Photonics
    • Nanotechnology
    • Materials Science

    Background:

    • Current two-dimensional (2D) gratings require enhanced performance, including polarization independence, high efficiency, and wide bandwidth.
    • Beam splitting applications demand advanced grating designs for improved functionality.

    Purpose of the Study:

    • To propose and demonstrate a 2x2 2D silver cylindrical array grating with superior polarization-independent diffraction efficiency (DE).
    • To achieve high DE for beam splitting applications within the communication band.

    Main Methods:

    • Rigorous Coupled Wave Analysis (RCWA) for theoretical calculation and design optimization.
    • Fabrication using holographic exposure technology, wet chemical development, and electron beam evaporation.
    • Experimental verification of calculated performance through measurement of the fabricated grating.

    Main Results:

    • Achieved over 24% DE for four first diffraction orders at 1550 nm.
    • Demonstrated excellent polarization independence with only 1.43% nonuniformity for both transverse electric (TE) and transverse magnetic (TM) polarizations.
    • Experimental results validated the accuracy of the RCWA calculations.

    Conclusions:

    • The proposed 2D silver cylindrical array grating exhibits excellent polarization-independent high diffraction efficiency.
    • This grating design shows significant potential for applications in optical communication, semiconductor manufacturing, and displacement measurement.