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Updated: Oct 17, 2025

Light Enhanced Hydrofluoric Acid Passivation: A Sensitive Technique for Detecting Bulk Silicon Defects
Published on: January 4, 2016
Selective Fluoride Transport in Subnanometer TiO2 Pores
Xuechen Zhou1, Mohammad Heiranian1, Meiqi Yang1
1Department of Chemical and Environmental Engineering, Yale University, New Haven, Connecticut 06511, United States.
Abstract:
Synthesizing nanopores which mimic the functionality of ion-selective biological channels has been a challenging yet promising approach to advance technologies for precise ion-ion separations. Inspired by the facilitated fluoride (F-) permeation in the biological fluoride channel, we designed a highly fluoride-selective TiO2 film using the atomic layer deposition (ALD) technique. The subnanometer voids within the fabricated TiO2 film (4 Å < d < 12 Å, with two distinct peaks at 5.5 and 6.5 Å), created by the hindered diffusion of ALD precursors (d = 7 Å), resulted in more than eight times faster permeation of sodium fluoride compared to other sodium halides. We show that the specific Ti-F interactions compensate for the energy penalty of F- dehydration during the partitioning of F- ions into the pore and allow for an intrapore accumulation of F- ions. Concomitantly, the accumulation of F- ions on the pore walls also enhances the transport of sodium (Na+) cations due to electrostatic interactions. Molecular dynamics simulations probing the ion concentration and mobility within the TiO2 pore further support our proposed mechanisms for the selective F- transport and enhanced Na+ permeation in the TiO2 film. Overall, our work provides insights toward the design of ion-selective nanopores using the ALD technique.
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