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Updated: Oct 17, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Ruslan V Shimansky1, Dmitrij A Belousov1, Victor P Korolkov1
1Institute of Automation and Electrometry SB RAS, 630090 Novosibirsk, Russia.
This study introduces diffractive microstructure sensors for computer-generated holograms (CGH). These sensors detect and quantify CGH fabrication errors using diffraction-based overlay, improving hologram accuracy.
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