Diffractive Sensor Elements for Registration of Long-Term Instability at Writing of Computer-Generated Holograms

Area of Science:

• Optics and Photonics
• Metrology
• Nanofabrication

Background:

• Computer-generated holograms (CGH) are crucial for optical systems.
• Accurate fabrication of CGHs is essential for their performance.
• Existing methods for detecting CGH fabrication errors can be complex and time-consuming.

Purpose of the Study:

• To develop and validate a novel method for in-situ estimation of CGH fabrication errors.
• To introduce specialized diffractive microstructure sensors for CGH manufacturing.
• To assess the efficiency of these sensors in quantifying writing errors.

Main Methods:

• Integration of two-part diffractive microstructure sensors within CGH patterns.
• Utilizing diffraction-based overlay principles for error detection.
• Employing circular and X-Y laser writing systems for sensor fabrication.
• Mathematical modeling and experimental validation of the sensor performance.

Main Results:

• Demonstrated the ability of diffractive microstructure sensors to detect shifts caused by writing errors.
• Quantified fabrication errors along orthogonal coordinates based on microstructure shifts.
• Validated the effectiveness of the developed method through experimental tests.
• Showcased the efficiency of built-in sensors for CGH writing error estimation.

Conclusions:

• The developed diffractive microstructure sensors provide an efficient and accurate method for estimating CGH fabrication errors.
• This technique enables precise control and improvement of CGH manufacturing processes.
• The built-in sensor approach offers a significant advancement in holographic fabrication quality assurance.