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Updated: Oct 16, 2025

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Soongyu Yi1, Jin Xiang1, Ming Zhou1
1Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Madison, WI, USA.
This study introduces a novel angle-based wavefront sensor using ultra-compact flat optics. This innovation significantly enhances spatial resolution, enabling advanced quantitative phase imaging and high-resolution surface topography measurements.
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