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Preparation of Large-area Vertical 2D Crystal Hetero-structures Through the Sulfurization of Transition Metal Films for Device Fabrication
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Mist chemical vapor deposition of crystalline MoS2atomic layer films using sequential mist supply mode and its

Abdul Kuddus1, Arifuzzaman Rajib1, Kojun Yokoyama1

  • 1Graduate School of Science and Engineering, Saitama University, Saitama 338-8570, Japan.

Nanotechnology
|October 19, 2021
PubMed

Keywords:
FETsMoS2 mono/bilayermist CVDsequential mist supplysulfurization

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