Hybrid Cell Structure for Wideband CMUT: Design Method and Characteristic Analysis

Hongliang Wang1, Xiao Huang1, Lijun Yu1

  • 1National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, North University of China, Taiyuan 030051, China.

Micromachines
|October 23, 2021
PubMed
Summary

This study introduces a novel hybrid cell structure for wideband Capacitive Micromachined Ultrasonic Transducers (CMUTs). The research optimizes CMUT bandwidth for enhanced performance in various applications.

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