In Situ Sputtering Silver Induction Electrode for Stable and Stretchable Triboelectric Nanogenerators

Triboelectric nanogenerators (TENG) can convert mechanical energy into electricity and exhibit unique advantages in the field of low-frequency and discrete energy harvesting. However, the interfacial state and stability between the triboelectric layer and electrode layer influence the output and applications of TENG. Herein, an in situ sputtering Ag process for fabricating induction electrodes is proposed to match with TENG. The sputtering Ag process is optimized by a variety of parameters, such as sputtering power, single-cycle time, number of cycles, cycle interval, and vacuum degree. In addition, the chemical state of Ag as a function of air placement is investigated, showing the sputtered Ag has excellent conductivity and stability. Moreover, four kinds of polymers are selected for fabricating TENGs based on the sputtered Ag induction electrodes, i.e., nylon 66, polyimide (PI), fluorinated ethylene propylene (FEP), and polydimethylsiloxane (PDMS), which shows great applicability. Considering the demand of flexible power suppliers, the sputtered Ag is integrated with a PDMS substrate, and shows good adhesion, flexibility, and ductility after severe deformation of the PDMS. Finally, the developed induction electrode processing technology is used in flexible TENG and shows great prospects in self-powered electronics for practical applications.