Nano/Micro-Structured ZnO Rods Synthesized by Thermal Chemical Vapor Deposition with Perpendicular Configuration

Under a one-step process, catalyst-free growth of one-dimensional (1D) ZnO hierarchical nanostructures was performed on ZnO-seeded Si substrate by thermal chemical vapor deposition with a perpendicular setup. The morphological and crystallographic properties of the nano/micro-structured ZnO rods were investigated with varying growth temperature and growth time. X-ray diffraction patterns of 1D ZnO double-structured rods showed the hexagonal wurtzite structure. The morphology and crystal structure of the ZnO double-structured rods were sensitive to the growth temperature and growth time. From Raman scattering and photoluminescence spectra, the orientation and size effects of the ZnO double-structured rods were discussed in relation to growth temperatures and growth times.