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Highly sensitive low field Lorentz-force MEMS magnetometer.

Sofiane Ben Mbarek1, Nouha Alcheikh1, Hassen M Ouakad2

  • 1Physical Science and Engineering Division, King Abdullah University of Science and Technology, Thuwal, 23955-6900, Saudi Arabia.

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This study introduces a novel Lorentz-force magnetic micro-sensor with unprecedented sensitivity for detecting low magnetic fields. The micro-sensor achieves a 100 µT minimum detectable field, significantly outperforming existing technologies.

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Area of Science:

  • Micro-electromechanical systems (MEMS)
  • Applied Physics
  • Magnetometry

Background:

  • Accurate measurement of low magnetic fields is crucial for various scientific and technological applications.
  • Existing magnetic sensors often lack the required sensitivity for detecting weak magnetic signals, such as biomagnetic fields.
  • Lorentz-force-based magnetometers offer a potential pathway to high-sensitivity magnetic field detection.

Purpose of the Study:

  • To develop and characterize a highly sensitive Lorentz-force magnetic micro-sensor.
  • To investigate the sensor's performance in measuring low magnetic field values.
  • To explore the potential of this micro-sensor for biomagnetic field measurements.

Main Methods:

  • Fabrication of a silicon micro-beam sandwiched between electrodes for electrostatic actuation and current detection.
  • Utilizing the resonance frequency shift of the micro-beam around its buckling zone to detect out-of-plane magnetic fields.
  • Development of an analytical model based on Euler-Bernoulli beam theory and Galerkin discretization for performance verification.

Main Results:

  • Achieved a measured sensitivity of 11.6 T⁻¹ at a bias current of 0.91 mA, which is five orders of magnitude higher than the state-of-the-art.
  • Demonstrated a minimum detectable magnetic field of 100 µT and an estimated resolution of 13.6 µT.Hz⁻¹/².
  • Exhibited good agreement between experimental data and the developed analytical model.

Conclusions:

  • The developed Lorentz-force magnetic micro-sensor offers exceptional sensitivity for low magnetic field measurements.
  • The sensor's performance is validated by analytical modeling and experimental results.
  • This technology holds significant promise for applications requiring the detection of very weak biomagnetic fields.