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Updated: Oct 14, 2025

The Effect of Anodization Parameters on the Aluminum Oxide Dielectric Layer of Thin-Film Transistors
Published on: May 24, 2020
A comparative study of two-step anodization with one-step anodization at constant voltage
Huipeng Zeng1, Chengyuan Li1, Yuxin Dan1
1Key Laboratory of Soft Chemistry and Functional Materials of Education Ministry, NanJing University of Science and Technology, Nanjing 210094, People's Republic of China.
Abstract:
Two-step anodization has been widely used because it can produce highly self-organized anodic TiO2nanotubes, but the differences in morphology and current-time curve of one-step anodization and two-step anodization are rarely reported. Here, one-step anodization and two-step anodization were conducted at different voltages. By comparing the FESEM image of anodic TiO2nanotubes fabricated by one-step anodization and two-step anodization, it was found that the variation of morphology characteristics is same with voltage. The distinction of morphology and current-time curve between one-step anodization and two-step anodization at the same voltage were analyzed: the nanotube average growth rate and porosity of two-step anodization are greater than that of one-step anodization. In the current-time curve, the duration of stage I and stage II in two-step anodization are significantly shorter than one-step anodization. The traditional field-assisted dissolution theory cannot explain the three stages of the current-time curves and their physics meaning under different voltages in the same fluoride electrolyte. Here, the distinction between one-step anodization and two-step anodization was clarified successfully by the theories of ionic current and electronic current and oxygen bubble mould.
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