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Updated: Oct 14, 2025

The Effect of Anodization Parameters on the Aluminum Oxide Dielectric Layer of Thin-Film Transistors
Published on: May 24, 2020
A comparative study of two-step anodization with one-step anodization at constant voltage.
Huipeng Zeng1, Chengyuan Li1, Yuxin Dan1
1Key Laboratory of Soft Chemistry and Functional Materials of Education Ministry, NanJing University of Science and Technology, Nanjing 210094, People's Republic of China.
This study compares one-step and two-step anodization for creating titanium dioxide (TiO2) nanotubes. Two-step anodization yields greater nanotube growth rate and porosity compared to one-step methods.
Area of Science:
- Materials Science
- Electrochemistry
- Nanotechnology
Background:
- Two-step anodization is favored for producing self-organized titanium dioxide (TiO2) nanotubes.
- Limited reports exist on the morphological and current-time curve differences between one-step and two-step anodization.
Purpose of the Study:
- To investigate and compare the morphological characteristics and current-time curves of TiO2 nanotubes produced by one-step and two-step anodization.
- To clarify the distinctions between these two anodization methods under varying voltages.
Main Methods:
- Fabrication of anodic TiO2 nanotubes using both one-step and two-step anodization techniques at different voltages.
- Analysis of nanotube morphology using Field Emission Scanning Electron Microscopy (FESEM).
- Comparison of current-time curves generated during both anodization processes.
Main Results:
- Morphological characteristics of TiO2 nanotubes varied consistently with applied voltage for both methods.
- Two-step anodization resulted in a higher average nanotube growth rate and increased porosity compared to one-step anodization.
- The duration of stages I and II in the current-time curves was significantly shorter for two-step anodization.
Conclusions:
- The study successfully differentiated the outcomes of one-step and two-step anodization processes.
- Traditional field-assisted dissolution theory is insufficient to explain the observed current-time curve stages and their physical meanings.
- The findings were explained by incorporating theories of ionic and electronic currents, alongside oxygen bubble molding.
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