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Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique
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A high-resolution, ultrabroad-range and sensitive capacitive tactile sensor based on a CNT/PDMS composite for robotic
Xiang Fu1, Jiqiang Zhang1, Jianliang Xiao1
1Research Center for Intelligent Sensing, Zhejiang Lab, Hangzhou, 310000, China.
Nanoscale
|November 9, 2021
Summary
This study introduces a flexible capacitive tactile sensor array using carbon nanotube/polydimethylsiloxane films for enhanced robotic perception. The novel sensor achieves high sensitivity and a broad working range, enabling precise object manipulation and identification.
Area of Science:
- Robotics
- Materials Science
- Sensor Technology
Background:
- Tactile sensors are crucial for improving robotic manipulation and identification.
- Developing cost-effective, high-sensitivity tactile sensor arrays with a broad range remains a challenge.
Purpose of the Study:
- To develop a flexible capacitive tactile sensor array with high sensitivity and a broad working range.
- To demonstrate the sensor's potential for robotic applications and mass production.
Main Methods:
- Fabrication of a flexible capacitive tactile sensor array using carbon nanotube (CNT)/polydimethylsiloxane (PDMS) film, parylene films, and polyimide (PI) films with electrodes.
- Utilizing CNT/PDMS as a high-dielectric-permittivity material for enhanced sensitivity.
- Employing parylene films as a scaffold to extend the sensor's working pressure range.
Main Results:
- Achieved high sensitivity of 1.61% kPa-1 (<1 MPa).
- Demonstrated an ultra-broad pressure working range from 0.9 kPa to 2.55 MPa.
- Exhibited excellent durability and stability over 5000 cycles with a fast response time.
Conclusions:
- The developed tactile sensor array shows great potential for robotic perception, enabling object differentiation and manipulation with closed-loop pressure feedback.
- The scalable fabrication procedure suggests feasibility for mass production.
- The sensor is also promising for wearable applications.

