A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau...

Area of Science:

• Metrology
• Optical Engineering
• Precision Measurement

Background:

• Accurate pitch deviation measurement is crucial for high-precision linear scales.
• Existing methods have limitations in measuring long-range scales.

Purpose of the Study:

• To extend interferometric self-calibration for evaluating pitch deviation of long-range linear scales.
• To develop a stitching interferometry technique for enhanced measurement range and accuracy.

Main Methods:

• Utilized a stitching interferometry technique combined with an interferometric self-calibration method.
• Derived theoretical equations for X-directional pitch deviation stitching.
• Mitigated the second-order accumulation effect by canceling reference flat error.

Main Results:

• Successfully simulated and experimentally verified the proposed self-calibration stitching method.
• Demonstrated feasibility for calibrating X-directional pitch deviation over the entire 105 mm length of a linear scale.
• Achieved accurate evaluation of pitch deviation for long-range linear scales.

Conclusions:

• The proposed interferometric self-calibration stitching method is effective for long-range linear scale pitch deviation evaluation.
• This technique overcomes range limitations of previous methods.
• Enables precise metrology for industrial applications requiring long linear scales.