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Updated: Oct 13, 2025

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding
Published on: January 9, 2014
Nam Woon Kim1, Hyeonjeong Choe2, Muhammad Ali Shah1
1Department of Nature-Inspired System and Application, Korea Institute of Machinery and Materials, Daejeon 34103, Korea.
Optimizing divinylsiloxane-bis-benzocyclobutene (DVS-BCB) bonding requires specific conditions. Void-free DVS-BCB bonding is achieved with a compressive pressure of 0.6 N/mm², vacuum, and 250 °C curing, enhancing semiconductor packaging.
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