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Updated: Oct 13, 2025

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
09:42

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

Published on: August 8, 2025

415

Ultra-narrow passband-tunable filter based on a high-Q silicon racetrack resonator

Jin Xu, Yujia Zhang, Xuhan Guo

    Optics Letters
    |November 15, 2021
    PubMed

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