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Resonant sheath heating in weakly magnetized capacitively coupled plasmas due to electron-cyclotron motion

Quan-Zhi Zhang1, Jing-Yu Sun1, Wen-Qi Lu1

  • 1Key Laboratory of Materials Modification by Laser, Ion, and Electron Beams (Ministry of Education), School of Physics, Dalian University of Technology, Dalian 116024, China.

Physical Review. E
|November 16, 2021
PubMed

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