Development of computer-controlled atmospheric pressure plasma structuring for 2D/3D pattern on fused silica

Area of Science:

• Materials Science
• Optical Engineering
• Surface Fabrication

Background:

• Fused silica optics with structured patterns are crucial for advanced imaging and illumination.
• Traditional fabrication methods face limitations in precision and efficiency for complex fused silica structures.

Purpose of the Study:

• To propose and develop a computer-controlled atmospheric pressure plasma structuring (APPS) technique for fabricating 2D and 3D patterns on fused silica.
• To investigate the discharge characteristics and removal function of the APPS system for precise material processing.

Main Methods:

• Development of a capacitively coupled APPS system with a double-layer plasma torch.
• Utilizing multi-physics simulation and process investigation to achieve a stable, Gaussian-shaped removal function.
• Exploring discrete and continuous APPS modes for diverse pattern generation.

Main Results:

• Successful fabrication of various 2D patterns, including square and hexagon lens arrays, and groove arrays.
• Demonstration of complex 3D phase plate patterns with high accuracy and efficiency.
• Validation of the controllable Gaussian-shape removal function for deterministic material processing.

Conclusions:

• The proposed APPS technique is effective for fabricating intricate 2D and 3D patterns on fused silica optics.
• APPS offers a promising, non-contact method for high-precision optical component manufacturing.
• The developed system provides flexibility and high material removal rates for fused silica structuring.