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Updated: Oct 12, 2025

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
A new Optical Differentiation Wavefront Sensor using a telephoto lens offers a compact design, reducing system length by five times. This sensor achieves high accuracy (better than λ/10 RMS) and demonstrates tolerance to alignment errors.
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