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Fabrication of Silica Ultra High Quality Factor Microresonators
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High-Q, submicron-confined chalcogenide microring resonators.

Zhen Yang, Rizhen Zhang, Zhiyuan Wang

    Optics Express
    |November 23, 2021
    PubMed
    Summary

    High-quality germanium antimony selenide (GeSbSe) microring resonators achieve a high Q factor of 4.1 × 105. These resonators show significant potential for integrated nonlinear photonics applications.

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    Area of Science:

    • Integrated photonics
    • Materials science
    • Nonlinear optics

    Background:

    • Chalcogenide glasses offer unique nonlinear optical properties.
    • High index-contrast waveguides are crucial for miniaturizing photonic devices.
    • Microring resonators are key components for various photonic applications.

    Purpose of the Study:

    • To demonstrate high quality (Q) factor microring resonators using GeSbSe chalcogenide glass.
    • To investigate the nonlinear properties of submicron GeSbSe waveguides.
    • To assess the potential of GeSbSe microring resonators for integrated nonlinear photonics.

    Main Methods:

    • Fabrication of GeSbSe chalcogenide glass waveguides using electron-beam lithography.
    • Plasma dry etching for precise waveguide definition.
    • Characterization of microring resonators in the telecom band.

    Main Results:

    • Achieved an intrinsic Q factor of 4.1 × 105 for a 90 μm radius microring resonator.
    • Determined an effective nonlinear coefficient up to ~110 W-1m-1 at 1550 nm.
    • Demonstrated a superior figure-of-merit compared to previous submicron chalcogenide waveguides.

    Conclusions:

    • GeSbSe microring resonators exhibit excellent performance characteristics.
    • The combination of high Q factor and large nonlinear coefficient makes them suitable for nonlinear photonics.
    • These resonators represent a promising platform for advanced integrated photonic circuits.