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Hybrid-net: a two-to-one deep learning framework for three-wavelength phase-shifting interferometry.

Jiaosheng Li, Qinnan Zhang, Liyun Zhong

    Optics Express
    |November 23, 2021
    PubMed
    Summary

    This study introduces a novel deep learning (DL) framework for three-wavelength phase-shifting interferometry. The method enhances measurement range and flexibility by using two wavelengths to predict a third, overcoming limitations of dual-wavelength interferometry (DWI).

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    Area of Science:

    • Optical Metrology
    • Interferometry
    • Deep Learning Applications

    Background:

    • Phase-shifting interferometry (PSI) is a key technique for high-precision surface measurement.
    • Dual-wavelength interferometry (DWI) extends the measurement range but has limitations.
    • Deep learning (DL) offers potential for advancing interferometric techniques.

    Purpose of the Study:

    • To develop a novel deep learning framework for three-wavelength phase-shifting interferometry.
    • To enhance the measurement range and flexibility beyond traditional DWI methods.
    • To enable accurate prediction of a third wavelength's interferogram using two input wavelengths.

    Main Methods:

    • A two-to-one deep learning (DL) framework, termed hybrid-net, was proposed.
    • The framework utilizes interferograms from two wavelengths as input.
    • The output is the predicted interferogram of a third, freely selectable wavelength.

    Main Results:

    • The hybrid-net accurately reconstructs the third wavelength's interferogram.
    • The proposed method significantly improves the measurement range compared to DL-based DWI.
    • Independent step samples benefit from extended measurement range due to auxiliary information.
    • The third wavelength can be freely chosen, offering more phase measurement rulers.

    Conclusions:

    • The developed DL framework successfully realizes three-wavelength phase-shifting interferometry.
    • The method effectively expands the measurement range without altering the existing DWI system.
    • This approach provides enhanced flexibility and precision for optical metrology applications.