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Updated: Oct 12, 2025

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
Effects of Semiconduction on Thickness-Extensional Modes of Piezoelectric Resonators
Abstract:
We study thickness-extensional vibrations of a piezoelectric semiconductor plate for resonator application. A perturbation integral for the semiconduction-induced frequency shift is obtained, which shows that the first-order frequency shift represents a damping effect due to semiconduction. Numerical results for ZnO and AlN plates are presented.
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