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Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures.

Philipp Hönicke1, Yves Kayser1, Konstantin V Nikolaev2

  • 1Div. 7 - Temperature and Synchrotron Radiation, Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587, Berlin, Germany.

Small (Weinheim an Der Bergstrasse, Germany)
|November 25, 2021
PubMed
Summary

Grazing exit X-ray fluorescence offers a new nondestructive method to analyze nanostructures. This technique simultaneously measures dimensional and elemental properties of multiple nanostructures, overcoming limitations of current metrology.

Keywords:
dimensional and compositional analysisgrazing exit X-ray fluorescencemachine learningnanostructure characterization

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Area of Science:

  • Nanotechnology
  • Materials Science
  • Analytical Chemistry

Background:

  • Current metrology techniques struggle to characterize complex 3D nanostructures.
  • Existing nondestructive methods often only analyze surfaces, leaving buried structures unexamined.
  • Destructive methods provide limited spatial information on critical buried nanostructure components.

Purpose of the Study:

  • To introduce and validate grazing exit X-ray fluorescence (GEXRF) as a metrology technique for nanostructures.
  • To demonstrate GEXRF's capability for simultaneous dimensional and elemental analysis.
  • To highlight GEXRF's nondestructive nature and compatibility with standard laboratory equipment.

Main Methods:

  • Utilizing grazing exit X-ray fluorescence (GEXRF) for analysis.
  • Characterizing ensembles of regularly ordered nanostructures.
  • Employing nondestructive testing on typical test fields.

Main Results:

  • Simultaneous characterization of dimensional properties and elemental composition.
  • Nondestructive analysis of nanostructures, including buried components.
  • Sub-nanometer discrimination capabilities for critical parameters.
  • Compatibility with laboratory-scale instrumentation, avoiding large-scale facilities.

Conclusions:

  • Grazing exit X-ray fluorescence is a powerful, nondestructive metrology tool for nanostructures.
  • The technique overcomes limitations of existing methods for analyzing complex 3D nanodevices.
  • GEXRF enables detailed analysis of both surface and buried nanostructure features with high precision.