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LIPSS-based functional surfaces produced by multi-beam nanostructuring with 2601 beams and real-time thermal
P Hauschwitz1, J Martan2, R Bičišťová3
1Hilase Centre, Institute of Physics, Academy of Sciences of the Czech Republic, Za Radnici 828, Dolni Brezany, 25241, Czech Republic. petr.hauschwitz@hilase.cz.
Scientific Reports
|November 26, 2021
Summary
This study introduces a novel laser system and Diffractive Optical Element (DOE) for rapid, high-throughput fabrication of Laser Induced Periodic Surface Structures (LIPSS). Real-time monitoring via infrared radiometry enables precise control and dynamic calibration for functional surface creation.
Area of Science:
- Materials Science
- Nanotechnology
- Laser Physics
Background:
- Laser Induced Periodic Surface Structures (LIPSS) offer tunable surface properties.
- Efficient and scalable fabrication methods for LIPSS are crucial for industrial applications.
- Existing methods often lack real-time process control and high throughput.
Purpose of the Study:
- To develop a high-throughput method for fabricating LIPSS using a unique laser system and Diffractive Optical Element (DOE).
- To implement real-time monitoring of LIPSS formation using fast infrared radiometry.
- To investigate the underlying physics of laser-material interaction during LIPSS fabrication.
Main Methods:
- Utilized an ultrashort high-energy pulsed laser system with exceptional beam quality.
- Employed a novel Diffractive Optical Element (DOE) to generate 2601 simultaneous laser spots.
- Integrated galvanometric scanners for pattern stitching and fast infrared radiometry for process monitoring.
- Analyzed solidification plateaus for dynamic calibration and heat accumulation measurements.
Main Results:
- Achieved simultaneous production of 2601 LIPSS spots in a 1x1 mm matrix in <0.01 ms.
- Demonstrated real-time monitoring of LIPSS formation with observed solidification plateaus.
- Measured heat accumulation temperatures ranging from 200 to 1000 °C, revealing insights into laser ablation physics.
- Attained a record throughput of 1910 cm²/min for LIPSS nanostructuring over a 40x40 mm area.
Conclusions:
- The combined laser system and DOE enable highly efficient and scalable LIPSS fabrication.
- Real-time infrared radiometry provides effective quality control and dynamic process calibration.
- The demonstrated throughput and control show significant potential for producing advanced functional surfaces.

