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High Aspect Ratio Structuring of Glass with Ultrafast Bessel Beams.
Christian Vetter1, Remo Giust1, Luca Furfaro1
1FEMTO-ST Institute, University Bourgogne Franche-Comté, CNRS, 15B Avenue des Montboucons, CEDEX, 25030 Besançon, France.
Materials (Basel, Switzerland)
|November 27, 2021
Summary
Ultrafast Bessel beams enable void channel formation in glass for high-speed dicing. Void formation is controllable in fused silica but restricted in specialized glasses like Eagle XG and Gorilla glass.
Area of Science:
- Materials Science
- Laser Physics
- Nanotechnology
Background:
- High aspect ratio void channels in glass are crucial for advanced manufacturing processes like high-speed dicing.
- Controlling void formation is key to optimizing these applications.
Purpose of the Study:
- To investigate void formation in glass using ultrafast Bessel beams.
- To characterize the influence of laser parameters and glass type on void morphology.
Main Methods:
- Utilized single-shot illumination with ultrafast Bessel beams.
- Investigated void formation in fused silica, Corning Eagle XG, and Corning Gorilla glass.
- Varied pulse energy, pulse duration, and beam position.
Main Results:
- Void formation was achievable in fused silica across a broad parameter range.
- Eagle XG and Gorilla glass exhibited a more restricted operating window for void formation.
- Observed transient molten layer formation around voids, aiding morphological interpretation.
Conclusions:
- Ultrafast Bessel beams offer a method for controlled void channel generation in glass.
- Glass composition significantly impacts the parameters required for void formation.
- Understanding molten layer dynamics is essential for predicting void morphology.
