Surface Patterning of Closed Nanochannel Using VUV Light and Surface Evaluation by Streaming Current.

Kyojiro Morikawa1, Haruki Kazumi1, Yoshiyuki Tsuyama2

  • 1Department of Applied Chemistry, School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8656, Japan.

Micromachines
|November 27, 2021
PubMed
Summary

This study demonstrates vacuum ultraviolet (VUV) light for surface patterning in closed nanochannels. Streaming-current measurements successfully evaluated the surface modification, enabling precise control in nanofluidics.

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