A Miniature Optical Force Dual-Axis Accelerometer Based on Laser Diodes and Small Particles Cavities

Area of Science:

• Optical Physics
• MEMS Technology
• Inertial Sensing

Background:

• Optical accelerometers offer high sensitivity and accuracy.
• Existing optical accelerometers are large and complex, limiting them to laboratory use.
• A need exists for compact optical accelerometers for practical engineering applications.

Purpose of the Study:

• To propose a miniature optical force dual-axis accelerometer.
• To overcome the size and complexity limitations of previous optical accelerometers.
• To enable optical force-based acceleration measurement in compact engineering devices.

Main Methods:

• Developed a miniature optical system integrated with a Micro-Electro-Mechanical Systems (MEMS) particle cavity.
• Designed a cylindrical levitation system (Φ 10 mm × 33 mm) within a larger accelerometer package (200 mm × 100 mm × 100 mm).
• Utilized a laser diode light source with elliptical distribution for dual-axis sensitivity.

Main Results:

• Achieved a measurement range of ±0.17 g to ±0.26 g.
• Demonstrated measurement resolutions of 0.49 mg and 1.88 mg for the two axes.
• Exhibited short-term zero-bias stability of 4.4 mg and 9.2 mg on the orthogonal axes.

Conclusions:

• The proposed miniature optical force accelerometer is suitable for compact engineering devices.
• This device provides an effective solution for acceleration measurement using optical force effects.
• Miniaturization and MEMS technology enable practical applications of optical accelerometers.