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Glass Substrate Dust Removal Using 233 fs Laser-Generated Shockwave.

Myeongjun Kim1, Philgong Choi2, Jae Heung Jo1

  • 1Department of Photonics and Sensors, Hanman University, Daejeon 34430, Korea.

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|November 27, 2021
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Summary

Laser shockwave cleaning (LSC) effectively removes microscopic dust particles from display panels. This novel method achieves a 95% removal rate without damaging the glass substrate, offering an efficient alternative to conventional cleaning techniques.

Keywords:
LSCcleaningfemtosecond laserparticlesshockwave

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Area of Science:

  • Materials Science
  • Manufacturing Engineering
  • Optics and Photonics

Background:

  • Increasing pixel resolution in display panels necessitates highly effective dust elimination.
  • Conventional cleaning methods (ultrasonic, CO2, wet) face limitations in efficiency, cost, and environmental impact.
  • Microscopic dust particles pose a significant threat to the performance and yield of advanced display manufacturing.

Purpose of the Study:

  • To develop and evaluate a novel laser shockwave cleaning (LSC) method for display panel dust removal.
  • To investigate the optimal parameters for LSC to maximize cleaning efficiency while minimizing substrate damage.
  • To compare the performance of LSC against traditional cleaning techniques.

Main Methods:

  • Development of a laser shockwave cleaning (LSC) system utilizing a 233 fs pulsed laser.
  • Systematic study of the influence of laser pulse number and focal gap distance on glass substrate integrity.
  • Evaluation of cleaning efficiency based on particle removal ratio and effective cleaning area mapping.

Main Results:

  • Optimal LSC parameters identified as 500 pulses and a 20 μm gap distance to prevent glass substrate damage.
  • Achieved a consistent 95% particle removal ratio across varying particle densities.
  • Demonstrated effective cleaning area comparable to theoretical predictions.

Conclusions:

  • Laser shockwave cleaning (LSC) presents a viable, efficient, and non-damaging solution for microscopic dust removal in display manufacturing.
  • The optimized LSC parameters ensure high cleaning performance without compromising substrate integrity.
  • LSC offers a promising advancement over conventional cleaning methods for high-resolution display production.