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Updated: Oct 11, 2025

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Performance improvement of a silicon nitride ring resonator biosensor operated in the TM mode at 1310 nm
Lucía Castelló-Pedrero1, María I Gómez-Gómez1, Jaime García-Rupérez1
1Nanophotonics Technology Center, Universitat Politècnica de València, Camino de Vera s/n, Building 8F, 46022 Valencia, Spain.
Abstract:
Silicon-based ring resonators have been demonstrated to be a key element to build lab-on-chip devices due to their ability to perform as label-free photonic sensors. In this work, we demonstrate photonic biosensing using silicon nitride ring resonators operated in the TM mode around 1310 nm wavelengths. Our results show that operating the devices using the TM mode results in an increased sensitivity in comparison with the typically used TE mode, while working at 1310 nm wavelengths compared to 1550 nm contributes to an increased quality factor. As a result, a reduction in the intrinsic limit of detection is achieved, indicating the suitability of TM modes in the 1310 nm regime for biosensing using integrated photonics.

