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Lorentz scanning electron/ion microscopy.

Ken Harada1, Keiko Shimada1, Yoshio Takahashi2

  • 1CEMS, RIKEN (Institute of Physical and Chemical Research), Hatoyama, Saitama 350-0395, Japan.

Microscopy (Oxford, England)
|December 5, 2021
PubMed
Summary
This summary is machine-generated.

Researchers developed a new method to observe spatial electromagnetic fields using scanning electron/ion microscopes and electron holography. This technique estimates fields from grating distortions, applicable to various electron beam instruments.

Keywords:
Lorentz force modelcharged particle beamselectron holographygrating imagereconstruction techniquespatial electromagnetic fields

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Area of Science:

  • Physics
  • Materials Science
  • Microscopy

Background:

  • Accurate measurement of spatial electromagnetic fields is crucial for understanding material properties and device performance.
  • Conventional methods for electromagnetic field observation can be limited in resolution or applicability.

Purpose of the Study:

  • To develop a novel, widely applicable method for observing and measuring spatial electromagnetic fields.
  • To utilize scanning electron/ion microscopy combined with electron holography for field mapping.

Main Methods:

  • A cross-grating was placed below the specimen within the electron/ion beam instrument.
  • Specimens were observed under infocus conditions, while the grating was viewed under defocus conditions.
  • Electromagnetic fields were reconstructed by analyzing image distortions of the grating, based on the Lorentz force model.

Main Results:

  • The developed method successfully estimates spatial electromagnetic fields around specimens.
  • The technique is effective across low and middle magnification and resolution ranges.
  • The method is fundamentally compatible with existing electron and ion beam instruments.

Conclusions:

  • This technique provides a practical approach for visualizing and quantifying electromagnetic fields.
  • The method's broad applicability makes it valuable for diverse research in electron microscopy.
  • Further development could extend its use to higher resolution regimes.