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Related Concept Videos

Scanning Electron Microscopy01:07

Scanning Electron Microscopy

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A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
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X-ray Metrology for the Semiconductor Industry Tutorial

Daniel F Sunday1, Wen-Li Wu1, Scott Barton2

  • 1National Institute of Standards and Technology, Gaithersburg, MD 20899, USA.

Journal of Research of the National Institute of Standards and Technology
|December 8, 2021
PubMed
Summary

No abstract available in PubMed .

Keywords:
CDSAXSdimensional metrologysemiconductor industrysmall angle x-ray scattering

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