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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

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Realization of a coupled-mode heat engine with cavity-mediated nanoresonators

Jiteng Sheng1,2, Cheng Yang1, Haibin Wu1,2,3

  • 1State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China.

Science Advances
|December 8, 2021
PubMed

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