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Molecular bixbyite-like In12-oxo clusters with tunable functionalization sites for lithography patterning
Xiaofeng Yi1, Di Wang1,2, Fan Li1,2
1State Key Laboratory of Structural Chemistry, Fujian Institute of Research on the Structure of Matter, Chinese Academy of Sciences Fuzhou Fujian 350002 P. R. China LZhang@fjirsm.ac.cn.
Chemical Science
|December 9, 2021
Summary
Researchers developed novel indium-oxo clusters (InOCs) for lithography. These InOCs enable sub-50 nm patterning, advancing indium-based materials for microfabrication and lithography research.
Area of Science:
- Materials Science
- Nanotechnology
- Chemistry
Background:
- Indium oxides are crucial in technology but underexplored in lithography.
- Existing indium-based materials lack tailored properties for advanced patterning.
Purpose of the Study:
- To synthesize and characterize novel, large-sized indium-oxo clusters (InOCs).
- To explore the potential of these InOCs as precursors for electron beam lithography (EBL).
- To establish structure-property relationships for tunable solubility and patterning performance.
Main Methods:
- Synthesis of a new family of In12-oxo clusters with tunable functional groups.
- Characterization using ESI-MS for solution stability.
- Fabrication of homogeneous films via spin-coating.
- Electron beam lithography (EBL) for high-resolution patterning studies.
Main Results:
- Discovery of the largest indium-oxo clusters to date, serving as molecular models for bixbyite-type In2O3.
- Demonstration of tunable solubility through functionalization with halides and organic derivatives.
- Successful fabrication of sub-50 nm lines using EBL with optimized InOCs.
- Correlation between cluster structure, film quality, and patterning resolution.
Conclusions:
- The developed bixbyite-type In12-oxo clusters represent a significant advancement in indium-based patterning materials.
- These InOCs offer a new platform for fundamental studies in lithography and radiation mechanisms.
- Functionalized InOCs show promise for next-generation microfabrication techniques.
