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Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools
Published on: October 1, 2007
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Improved Resolution and Cost Performance of Low-Cost MEMS Seismic Sensor through Parallel Acquisition
Xing-Xing Hu1,2, Xi-Zhen Wang1, Bo Chen1
1Institute of Geophysics, China Earthquake Administration, Beijing 100081, China.
Sensors (Basel, Switzerland)
|December 10, 2021
Summary
By correlating data from multiple low-cost MEMS accelerometers, this study significantly enhances seismic sensor resolution for earthquake monitoring. This cost-effective approach improves seismic network performance and early warning capabilities.
Area of Science:
- Geophysics
- Seismology
- Sensor Technology
Background:
- Effective earthquake monitoring relies on dense, high-performance seismic sensor networks for rapid reporting and early warning.
- Existing seismic sensors often face limitations in resolution and cost, impacting network effectiveness.
Purpose of the Study:
- To propose a method for improving seismic sensor resolution using multiple low-cost, low-resolution digital MEMS accelerometers.
- To develop a cost-effective MEMS seismic sensor with enhanced data processing and storage capabilities.
Main Methods:
- Utilizing the correlation average method with multiple MEMS accelerometers to increase seismic data resolution.
- Developing an embedded system with ARM and Linux, featuring a large-capacity SD card for long-term data storage (approx. 12 months).
- Implementing real-time seismic data processing algorithms for automatic event identification and ground motion parameter calculation.
Main Results:
- Reduced RMS noise from 0.096 cm/s² (single sensor) to 0.034 cm/s² (eight sensors) in the 0.1-20 Hz bandwidth.
- Achieved a dynamic range exceeding 90 dB, with an amplitude-frequency response of DC-80 Hz (-3 dB).
- Demonstrated improved signal-to-noise ratio (SNR) for detecting earthquakes (M2.2-M5.1, <200 km) compared to previous methods.
Conclusions:
- The correlation average method effectively enhances the resolution of low-cost MEMS accelerometers for earthquake monitoring.
- The developed cost-effective MEMS seismic sensor offers improved performance, long-term data storage, and ease of installation.
- This approach provides a viable solution for increasing seismic network density and improving earthquake early warning systems.

