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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators

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Tunable and Transferable Diamond Membranes for Integrated Quantum Technologies.

Xinghan Guo¹, Nazar Delegan^1,2, Jonathan C Karsch¹

¹Pritzker School of Molecular Engineering, University of Chicago, Chicago, Illinois 60615, United States.

|December 13, 2021

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This summary is machine-generated.

Uniform, nanoscale diamond membranes with tunable thickness were created for quantum technology. These membranes enable efficient integration of color centers, like germanium-vacancy and nitrogen-vacancy, for advanced quantum applications.

Area of Science:

Quantum Information Science
Materials Science
Nanotechnology

Background:

Diamond color centers are promising qubits for quantum technologies.
Integrating these diamond qubits into device heterostructures presents significant challenges.

Purpose of the Study:

To develop a method for synthesizing tunable, ultra-thin diamond membranes for efficient integration of color centers.
To demonstrate the quantum coherence properties of color centers within these membranes.

Main Methods:

Synthesis of nanoscale-thick diamond membranes (50-250 nm) using "smart-cut" and isotopic purification.
Deterministic transfer and characterization of membranes with atomically flat surfaces and bulk-like crystallinity.
Incorporation of germanium-vacancy (GeV-) and nitrogen-vacancy (NV-) color centers via implantation and overgrowth.

Keywords:

color center diamond heterostructures quantum information science quantum sensing

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Main Results:

Individual GeV- centers in 110-nm membranes show stable photoluminescence with narrow optical linewidths (125 MHz at 5.4 K).
Individual NV- centers exhibit excellent room-temperature spin coherence (T2* up to 150 μs, T2 up to 400 μs).

Conclusions:

The developed diamond membrane platform facilitates straightforward integration of coherent color centers.
This approach advances the development of diamond-based quantum devices and technologies.