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Quantitative Local Probing of Polarization with Application on HfO2 -Based Thin Films
Owoong Kwon1, Seunghun Kang1, Sanghyun Jo2
1School of Advanced Materials and Engineering, Sungkyunkwan University (SKKU), Suwon, 16419, Republic of Korea.
Small Methods
|December 20, 2021
Summary
This study introduces a high-frequency atomic force microscopy technique for measuring ferroelectric polarization. The novel method enhances signal quality and efficiency for nanoscale materials like BiFeO3 and Hf0.5Zr0.5O2.
Area of Science:
- Materials Science
- Nanotechnology
- Solid State Physics
Background:
- Ferroelectric materials with switchable polarization are crucial for advanced technologies.
- Miniaturization to the nanoscale necessitates sophisticated characterization tools.
- Existing conductive atomic force microscopy (AFM)-positive-up-negative-down (PUND) methods operate at low frequencies, limiting efficiency.
Purpose of the Study:
- To develop a high-frequency AFM-PUND technique for improved ferroelectric characterization.
- To enable efficient measurement of nanoscale ferroelectric polarization.
- To validate the method on emerging ferroelectric materials.
Main Methods:
- Implementation of a novel high-frequency AFM-PUND method using continuous waveforms.
- Simultaneous acquisition of switching current for polarization-voltage hysteresis loop analysis.
- Application of the technique to BiFeO3 nanocapacitors and Hf0.5Zr0.5O2 thin films.
Main Results:
- Achieved polarization-voltage hysteresis loops at frequencies up to 100 kHz.
- Successfully measured nanoscale polarization values of BiFeO3 and Hf0.5Zr0.5O2.
- Demonstrated significant improvement in measurement efficiency and signal-to-noise ratio.
Conclusions:
- The developed high-frequency AFM-PUND method is effective for characterizing nanoscale ferroelectrics.
- This technique overcomes the limitations of low-frequency measurements.
- It provides a valuable tool for the study of emerging ferroelectric materials like Hf0.5Zr0.5O2.

