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Multiplex Chemical Imaging Based on Broadband Stimulated Raman Scattering Microscopy
Published on: July 25, 2022
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Spectrum imaging measurements with semi-parallel detection using an AES apparatus.
Noboru Taguchi1, Tatsuya Uchida2, Konomi Ikita2
1Research Institute of Electrochemical Energy, Department of Energy and Environment, National Institute of Advanced Industrial Science and Technology (AIST), 1-8-31 Midorigaoka, Ikeda, Osaka 563-8577, Japan.
Ultramicroscopy
|December 20, 2021
Summary
A new method creates Auger electron data cubes faster using a semi-parallel detection scheme and electrostatic hemispherical analyzer (HSA). This technique enables detailed elemental mapping of complex surfaces like lead-free solder.
Area of Science:
- Materials Science
- Surface Analysis
- Spectroscopy
Background:
- Auger electron spectroscopy (AES) is crucial for surface elemental analysis.
- Traditional AES methods can be time-consuming, especially for mapping.
- Analyzing samples with non-flat surfaces presents challenges for conventional techniques.
Purpose of the Study:
- To develop a faster method for acquiring Auger electron spectroscopy data.
- To enable the creation of three-dimensional (3D) data cubes from AES measurements.
- To demonstrate the capability of analyzing samples with complex surface topographies.
Main Methods:
- Implemented a semi-parallel detection scheme with a multi-channel electrostatic hemispherical analyzer (HSA).
- Optimized the Auger intensity map measurement to reduce detector energy sweeps.
- Applied post-processing techniques to correct for detector channel gain differences.
Main Results:
- Successfully constructed a data cube of Auger electron spectra.
- Demonstrated the method on a non-flat, lead-free solder sample.
- Showcased the ability to extract spectra from arbitrary positions and generate elemental maps.
Conclusions:
- The developed semi-parallel detection method significantly accelerates Auger electron spectroscopy data acquisition.
- The technique allows for the generation of comprehensive 3D spectral data cubes.
- This approach is effective for elemental mapping of challenging, non-flat sample surfaces.
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