Shaping of Electron Beams Using Sculpted Thin Films

Dolev Roitman1, Roy Shiloh2, Peng-Han Lu3,4

  • 1School of Electrical Engineering, Fleischman Faculty of Engineering, Tel Aviv University, Tel Aviv 69978, Israel.

ACS Photonics
|December 23, 2021
PubMed
Summary

Sculpted thin films enable advanced electron beam shaping for electron microscopy. This technology improves imaging resolution and measurement techniques by correcting aberrations and sorting electron orbital angular momentum.