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Updated: Oct 9, 2025

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A Thermopile Detector Based on Micro-Bridges for Heat Transfer

Na Zhou1,2, Xuefeng Ding3, Hongbo Li1,2

  • 1Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China.

Micromachines
|December 24, 2021
PubMed

Keywords:
CMOS processmicro-bridgepoly-Si thermocouplesthermal conductionthermopile detectors

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