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Measurement of Vibration Detection Threshold and Tactile Spatial Acuity in Human Subjects

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Published on: September 1, 2016

Step consistency active control method for inertial piezoelectric actuator using embedded strain gauges.

Jianfei Cheng¹, Jie Deng¹, Yingxiang Liu¹

¹State Key Laboratory of Robotics and System, Harbin Institute of Technology, Harbin 150001, Heilongjiang Province, China.

The Review of Scientific Instruments

|January 1, 2022

Summary

This study introduces an active control method for inertial piezoelectric actuators (IPAs) to improve step consistency. The novel approach ensures precise movement in micro-nano applications by dynamically adjusting pressure during operation.

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Area of Science:

Mechanical Engineering
Materials Science
Nanotechnology

Background:

Inertial piezoelectric actuators (IPAs) are crucial for micro-nano manipulation and biomedicine due to their simple design.
Achieving consistent step motion in IPAs over large stroke ranges is challenging due to machining limitations and inherent rollback.
This inconsistency restricts their application in high-precision fields.

Purpose of the Study:

To develop and validate an active control method for enhancing step consistency in inertial piezoelectric actuators (IPAs).
To address the limitations of current IPAs in maintaining precise movement over extended ranges.

Main Methods:

A novel active control strategy for IPAs is proposed, utilizing hybrid bending motions.
Embedded strain gauges function as force sensors to monitor pressure between the mover and actuator.
Horizontal bending drives the IPA, while vertical bending dynamically adjusts pressure for consistent force.

Main Results:

The active control method significantly improved step consistency, reducing the maximum standard deviation to 0.41 µm.
Under identical conditions, non-active control resulted in a maximum standard deviation of 1.14 µm.
These improvements were observed over a 2 mm stroke range across 500 driving cycles.

Conclusions:

The proposed active control method effectively enhances the step consistency of IPAs in large stroke ranges.
This advancement enables more reliable and precise applications of IPAs in demanding fields.
The use of hybrid bending motions and integrated force sensing offers a robust solution for actuator control.