Three-dimensional chemical-state imaging with reflection-mode soft x-ray absorption spectroscopy

In this study, a method for reflection-mode soft x-ray absorption spectroscopy was developed to realize three-dimensional chemical-state imaging. Soft x rays from a pinhole were reflected by the sample, and the magnified image was observed with a two-dimensional detector. This technique was applied to a Co film with an Au-island-covered surface to obtain the surface chemical state images with a spatial resolution of several tens of micrometers. Furthermore, the soft x-ray reflection spectra within and outside the Au layer were extracted from the images by changing the photon energy. Distinct differences were observed at the Co absorption edge. By considering anomalous x-ray scattering around the Co L-edges in the simulation, the reflection spectrum near the absorption edge in the nm depth resolution was reproduced. In the region without the Au layer, the results were well reproduced, assuming that 4 nm CoO was formed at the surface. These results demonstrate the feasibility of three-dimensional imaging of the chemical states in multilayer films.