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Programming Semiconductor Nanowire Composition with Sub-100 nm Resolution via the Geode Process.

Maritza Mujica¹, Amar Mohabir¹, Pralav P Shetty²

¹School of Chemical & Biomolecular Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, United States.

|January 6, 2022

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The Geode process enables scalable manufacturing of semiconductor nanowires, including silicon-germanium alloys. This method maintains nanoscale control without heat or mass transport limitations, proving effective for complex nanowire structures.

Area of Science:

Materials Science
Nanotechnology
Semiconductor Physics

Background:

Semiconductor nanowires are crucial for advanced electronic and optoelectronic devices.
Existing manufacturing methods face challenges in scalability and precise control.
The Geode process offers a novel approach for nanowire fabrication.

Purpose of the Study:

To demonstrate the vapor-liquid-solid growth of various semiconductor nanowires using the Geode process.
To evaluate the scalability and nanoscale programmability of the Geode process.
To assess the impact of microcapsule confinement on heat and mass transport for nanowire growth.

Main Methods:

Utilized the Geode process for vapor-liquid-solid growth of nanowires.
Grew single-crystalline intrinsic silicon (i-Si), i-Si/n-Si, and silicon-germanium (SiGe) nanowires.

Keywords:

germanium nanomanufacturing nanowires silicon vapor−liquid−solid

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Employed microcapsule powders with varying diameters and wall thicknesses.

Main Results:

Successfully grew i-Si, i-Si/n-Si, and SiGe nanowires within microcapsules.
Demonstrated negligible heat and mass transport limitations due to the microcapsule wall.
Achieved precise compositional control and minimal structural variations in nanowires.
Fabricated nanowires with over 16 segments and segment lengths below 75 nm.

Conclusions:

The Geode process significantly enhances the scalability of semiconductor nanowire manufacturing.
Microcapsule confinement does not impede critical transport phenomena for nanowire growth.
The Geode process offers a viable platform for producing complex, precisely controlled nanowire architectures.