Plasmonic Nanoslit Arrays Fabricated by Serial Bideposition: Optical and Surface-Enhanced Raman Scattering Study

Recently, studies have been carried out to combine surface-enhanced Raman spectroscopy substrates that are based on either localized surface plasmon or surface plasmon polariton structures. By combining these two systems, the individual drawbacks of each can be overcome. However, the manufacturing methods involved so far are sophisticated, labor-intensive, expensive, and technically demanding. We propose a facile method for the fabrication of a flexible plasmonic nanoslit surface-enhanced Raman scattering (SERS) sensor. We utilized the pattern on periodic optical disks as an inexpensive substitute for printing the periodic pattern on polydimethylsiloxane with soft imprint lithography. The Ag nanoslits were fabricated by serial bideposition using the dynamic oblique angle deposition technique. The nanoslit structures were physically and optically characterized, and the experimental results were compared to the results of the numerical simulation: Monte Carlo and finite-difference time-domain simulation. The AgNS samples showed excellent SERS performance with an enhancement factor of ∼10⁵ and a limit of detection of 5 × 10^-7 g/mL for a Rhodamine 6G solution. Their biosensing capability was demonstrated by the sensing of bilirubin.