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Updated: Oct 6, 2025

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Demonstration of an ultra-compact 8-channel sinusoidal silicon waveguide array for optical phased array
Abstract:
Here we demonstrate an ultra-compact 8-channel sinusoidal silicon waveguide array for an optical phased array. In our device, based on sinusoidal bending, the cross talk (CT) between waveguides can be efficiently reduced with a waveguide pitch of only 695 nm. For the transverse electric (TE) mode, the simulation results show that the insertion loss (IL) of the 100-µm-long device is 0.1 dB and the CT between all waveguides is lower than -25 dB at 1550 nm. In the measurements, an IL of less than 1 dB and CT lower than -18 dB are obtained. Since the pitch is related to the beam-steering range and power consumption of the optical phased array, such an ultra-compact device could potentially be a good candidate to build the emitter for an energy-efficient optical phased array with a large field of view.

