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Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application
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Erratum: ZnO-based MIS photodetectors

S J Young1, L W Ji2, S J Chang1,3

  • 1Institute of Microelectronics & Department of Electrical Engineering, National Cheng Kung University, Tainan 70101, Taiwan.

Sensors and Actuators. A, Physical
|January 18, 2022
PubMed

Keywords:
PhotodiodesSemiconducting II–VI materialsZnO

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