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Structural Design and Optimization of a Resonant Micro-Accelerometer Based on Electrostatic Stiffness by an Improved

Libin Huang1,2, Qike Li1,2, Yan Qin1,2

  • 1School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China.

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Summary
This summary is machine-generated.

This study presents a novel electrostatic stiffness resonant micro-accelerometer. Optimized using a differential evolution algorithm, it achieves a scale factor accuracy of 7.03%, verifying its design rationality.

Keywords:
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Area of Science:

  • MEMS (Micro-Electro-Mechanical Systems)
  • Sensor Technology
  • Nanotechnology

Background:

  • Micro-accelerometers are crucial for inertial sensing.
  • Existing designs face challenges with processing errors and common-mode noise.
  • Need for improved accuracy and signal decoupling in resonant accelerometers.

Purpose of the Study:

  • To design and optimize an in-plane resonant micro-accelerometer utilizing electrostatic stiffness.
  • To enhance performance by minimizing processing errors and common-mode effects.
  • To validate the structural design and optimization algorithm through experimental results.

Main Methods:

  • A one-piece proof mass structure with two symmetrically distributed double-folded beam resonators was designed.
  • A differential structure was implemented to mitigate common-mode errors.
  • An improved differential evolution algorithm was developed for optimizing the accelerometer's scale factor.
  • Fabrication was performed using deep dry silicon-on-glass (DDSOG) technology.

Main Results:

  • The fabricated accelerometer demonstrated unloaded resonant frequencies between 24 and 26 kHz.
  • The packaged accelerometer achieved a scale factor ranging from 54 to 59 Hz/g.
  • The average error between the optimized and actual scale factor was 7.03%.

Conclusions:

  • The developed electrostatic stiffness resonant micro-accelerometer design is rational and effective.
  • The improved differential evolution algorithm successfully optimized the scale factor with reduced complexity.
  • The DDSOG fabrication technology is suitable for producing such micro-accelerometers.