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Updated: Oct 6, 2025

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools
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A MEMS-Based Co-Oscillating Electrochemical Vector Hydrophone

Anxiang Zhong1,2, Mingwei Chen1,2, Yulan Lu1,2

  • 1State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China.

Micromachines
|January 21, 2022
PubMed

Keywords:
MEMSco-oscillating vector hydrophoneelectrochemical vibration sensor

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