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Published on: June 20, 2019
Blending Linear and Cyclic Block Copolymers to Manipulate Nanolithographic Feature Dimensions
Amy D Goodson1, Maxwell S Rick1, Jessie E Troxler1
1Department of Chemical and Biomolecular Engineering, Tulane University, New Orleans, Louisiana 70118, United States.
Blending cyclic and linear block copolymers (BCPs) allows for smaller nanofeature sizes crucial for nanolithography. Even with impurities, cyclic BCPs maintain their performance, offering a tunable approach for advanced materials.
Area of Science:
- Polymer Science
- Materials Science
- Nanotechnology
Background:
- Block copolymers (BCPs) self-assemble into nanoscale structures for applications in photonics, membranes, and nanolithography.
- Cyclic BCPs theoretically offer smaller features and improved stability compared to linear analogs.
- Challenges in synthesizing pure cyclic BCPs hinder large-scale manufacturing.
Purpose of the Study:
- To investigate the self-assembly behavior of cyclic/linear BCP blends using simulations.
- To evaluate the impact of blend composition on nanofeature size and interfacial width.
- To explore the potential of BCP blends for advanced nanolithography applications.
Main Methods:
- Dissipative particle dynamics simulations were employed to model BCP blend self-assembly.
- Analysis focused on nanofeature dimensions and interfacial width critical for nanopatterning.
- Simulated domain spacings were compared against strong segregation theory predictions.
Main Results:
- Mixtures of symmetric cyclic and linear BCPs showed minimal impact on feature dimensions and roughness with up to 10% impurity.
- Blending cyclic BCPs with linear BCPs enables fine-tuning of feature sizes.
- Significant deviations from strong segregation theory were observed due to molecular packing effects.
Conclusions:
- Cyclic/linear BCP blends offer a viable strategy for controlling nanofeature size in nanopatterning.
- The presence of cyclic BCPs in blends minimally affects performance even with impurities.
- Simulation insights provide a foundation for designing BCP materials for next-generation nanolithography.
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