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Updated: Oct 5, 2025

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
Published on: August 15, 2014
Mechanical frequency control in inductively coupled electromechanical systems
Thomas Luschmann1,2,3, Philip Schmidt4,5,6, Frank Deppe4,5,7
1Walther-Meißner-Institut, Bayerische Akademie der Wissenschaften, Walther-Meißner-Str.8, 85748, Garching, Germany. thomas.luschmann@wmi.badw.de.
Abstract:
Nano-electromechanical systems implement the opto-mechanical interaction combining electromagnetic circuits and mechanical elements. We investigate an inductively coupled nano-electromechanical system, where a superconducting quantum interference device (SQUID) realizes the coupling. We show that the resonance frequency of the mechanically compliant string embedded into the SQUID loop can be controlled in two different ways: (1) the bias magnetic flux applied perpendicular to the SQUID loop, (2) the magnitude of the in-plane bias magnetic field contributing to the nano-electromechanical coupling. These findings are quantitatively explained by the inductive interaction contributing to the effective spring constant of the mechanical resonator. In addition, we observe a residual field dependent shift of the mechanical resonance frequency, which we attribute to the finite flux pinning of vortices trapped in the magnetic field biased nanostring.
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