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Updated: Oct 5, 2025

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Published on: November 18, 2022
Optofluidic flow meter for sub-nanoliter per minute flow measurements
Jalal Sadeghi1,2, Paul N Patrone3, Anthony J Kearsley3
1University of Maryland, Department of Chemistry and Biochemistry, College Park, Maryland, United States.
Significance:
Performance improvements in microfluidic systems depend on accurate measurement and fluid control on the micro- and nanoscales. New applications are continuously leading to lower volumetric flow rates.
Aim:
We focus on improving an optofluidic system for measuring and calibrating microflows to the sub-nanoliter per minute range.
Approach:
Measurements rely on an optofluidic system that delivers excitation light and records fluorescence in a precise interrogation region of a microfluidic channel. Exploiting a scaling relationship between the flow rate and fluorescence emission after photobleaching, the system enables real-time determination of flow rates.
Results:
Here, we demonstrate improved calibration of a flow controller to 1% uncertainty. Further, the resolution of the optofluidic flow meter improved to less than 1 nL / min with 5% uncertainty using a molecule with a 14-fold smaller diffusion coefficient than our previous report.
Conclusions:
We demonstrate new capabilities in sub-nanoliter per minute flow control and measurement that are generalizable to cutting-edge light-material interaction and molecular diffusion for chemical and biomedical industries.
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